JPH0730679Y2 - 成膜装置 - Google Patents
成膜装置Info
- Publication number
- JPH0730679Y2 JPH0730679Y2 JP1989127587U JP12758789U JPH0730679Y2 JP H0730679 Y2 JPH0730679 Y2 JP H0730679Y2 JP 1989127587 U JP1989127587 U JP 1989127587U JP 12758789 U JP12758789 U JP 12758789U JP H0730679 Y2 JPH0730679 Y2 JP H0730679Y2
- Authority
- JP
- Japan
- Prior art keywords
- window member
- plate
- film forming
- thickness
- sapphire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052594 sapphire Inorganic materials 0.000 claims description 28
- 239000010980 sapphire Substances 0.000 claims description 28
- 239000013078 crystal Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 14
- 239000010408 film Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000012790 adhesive layer Substances 0.000 description 14
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127587U JPH0730679Y2 (ja) | 1989-10-31 | 1989-10-31 | 成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127587U JPH0730679Y2 (ja) | 1989-10-31 | 1989-10-31 | 成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0367057U JPH0367057U (en]) | 1991-06-28 |
| JPH0730679Y2 true JPH0730679Y2 (ja) | 1995-07-12 |
Family
ID=31675339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989127587U Expired - Fee Related JPH0730679Y2 (ja) | 1989-10-31 | 1989-10-31 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730679Y2 (en]) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61106770A (ja) * | 1984-10-30 | 1986-05-24 | Sumitomo Electric Ind Ltd | 気相コ−テイング装置 |
| JPS63163937A (ja) * | 1986-12-26 | 1988-07-07 | Minolta Camera Co Ltd | メモリ制御装置 |
-
1989
- 1989-10-31 JP JP1989127587U patent/JPH0730679Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0367057U (en]) | 1991-06-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |